| 摘要 |
An indexer of a wafer test apparatus is provided to protect a wafer from pollution by unloading a cassette for carrying the wafer without an additional manipulation. An indexer is installed in a wafer test apparatus, and loads/unloads a cassette. A main body(110) has an entrance. A cassette transfer unit(120) transfers a cassette so as to load/unload the cassette through the entrance. A loading/unloading switch(130) is installed on the main body so that the cassette transfer unit can load/unload the cassette by the switch operation. A controller(140) controls the cassette transfer unit to unload the tested cassette by receiving a signal from the wafer test apparatus.
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