TRANSFERRING ROBOT AND APPARATUS OF TRANSFERRING SUBSTRATE HAVING THE SAME

摘要

A transfer robot and a substrate transfer apparatus are provided to utilize a transfer space effectively and reduce foot-print by using double robot arms having different lengths. A transfer robot comprises a main body(520), a first robot arm(530) which is formed on the top of the main body and extended bidirectionally from the center as much as a first length, and a second robot arm(540) which has a greater length than the first length. The second robot arm moves freely within the range of the second length and connected to both ends of the first robot arm respectively.