发明名称 THE FABRICATING METHOD OF IMAGE SENSOR
摘要 A method for manufacturing an image sensor is provided to improve insulation property and simplify a manufacturing process by reducing the number of pattern processes by using a conventional mask. A first photoresist pattern(P11) having an opening is formed at a region where a first insulation region(15) is to be formed, wherein the first insulation region is formed between the region where a first align key(13) is formed on a semiconductor substrate(10), and first photodiodes. After forming the first insulation region using the first photoresist pattern as a mask, the first align key is formed. A second photoresist pattern is formed on the semiconductor substrate, and a first photodiode is formed by implanting dopant using the second photoresist pattern as the mask.
申请公布号 KR20080060419(A) 申请公布日期 2008.07.02
申请号 KR20060134450 申请日期 2006.12.27
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 LEE, SANG GI
分类号 H01L27/146 主分类号 H01L27/146
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