| 摘要 |
An organic layer depositing apparatus is provided to prevent the droop of a shutter from generating and to control the thickness of an organic layer deposited on a substrate precisely. A deposition source(20) is arranged at the inner bottom surface of a chamber body(10) and receives organic materials. A substrate fixing unit(30) is arranged at the upper side of the chamber body and fixes a substrate. The organic material vaporized from the deposition source is deposited on the substrate. A shutter unit(50) is arranged between the organic materials receiving member and the substrate fixing unit and controls the deposition amount of the organic materials. A rotation shaft assembly(40) rotates the shutter unit and combined with the shutter unit eccentrically. A sag preventing member is formed at the shutter unit and prevents the sag of the shutter unit. THE shutter unit includes a sub shutter unit having the main shutter unit and the sub shutter unit. |
