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经营范围
发明名称
Inspecting apparatus for semiconductor device
摘要
申请公布号
KR20080002294(U)
申请公布日期
2008.07.02
申请号
KR20060032624U
申请日期
2006.12.27
申请人
发明人
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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