| 摘要 |
A treating liquid supply device and a substrate treating apparatus are provided to enable a nozzle to spray the treating liquid at a constant temperature by maintaining a constant temperature of the treating liquid. A treating liquid supply device includes a treating liquid storage tank, a treating liquid supply line, and a nozzle(110). The treating liquid storage tank stores the treating liquid. The treating liquid supply line supplies the treating liquid from a treating liquid circulating line. The nozzle receives the treating liquid from the treating liquid supply line and sprays the treating liquid. The nozzle includes a supply tube(112) and first and second housings(114,116). The first housing is formed to surround an exterior of the supply tube and provides a space for containing constant temperature water therein. The second housing is arranged to surround an exterior of the first housing and provides a recollecting space for the constant temperature water, which is supplied to the first housing.
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