| 摘要 |
A substrate guide of a substrate dry apparatus is provided to dry a part of a substrate supported by a slot easily by forming a drainage structure draining the cleaning water of the slot during drying. A substrate guide of a substrate dry apparatus comprises a plurality of slots, two slot units(30) which are separated from each other as a predetermined distance, a center slot unit(40) which includes a plurality of slots, an connection unit(20) which is connected with both ends of the slot unit and the center slot unit, a drain hole(42) which is formed at the lower surface of each slot(41) of the center slot unit, and a drain tube(43) which connects bottom portions of each drain hole.
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