COATING DEVICE AND COATING METHOD

摘要

A coater, and a coating method are provided to allow the distribution of the thickness of a coated film to be uniform and to prevent the breakdown for a long time by allowing the coater to be adjusted easily. The coating process of a coater is carried out by supplying a coating solution to the coating solution discharge device(3) by operating a coating solution supply device(2) with moving a coating solution discharge device horizontally relatively to the member(13) to be coated loaded on a support(4) so as to allow the coating solution to be coated through the nozzle(12) of the coating solution discharge device on the member to be coated, wherein the coater comprises a manifold(19) which is installed on the way from the coating solution discharge device to the nozzle; a coating solution suction device(5) which sucks the coating solution from the nozzle through the manifold; and a control device(6) which initiates the coating solution suction of the coating solution discharge device by allowing the front aperture of the coating solution discharge device to be reached the final coating region of the member to be coated.