发明名称 TUBE TARGET
摘要 A method for producing a tubular target formed of molybdenum or a molybdenum alloy which has an oxygen content of less than 50 mug/g, a density of greater than 99% of the theoretical density and an average grain size of less than 100 mum and which is connected to a supporting tube. The molybdenum or molybdenum alloy tube is produced by extrusion.
申请公布号 EP1937866(A1) 申请公布日期 2008.07.02
申请号 EP20060790256 申请日期 2006.10.05
申请人 PLANSEE SE 发明人 ABENTHUNG, PETER;HUBER, KARL;LACKNER, HARALD;LEICHTFRIED, GERHARD;POLCIK, PETER;WERATSCHNIG, CHRISTIAN
分类号 C23C14/34 主分类号 C23C14/34
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