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发明名称
在光罩中修复桥接之方法
摘要
一种用于修正在光罩中之桥接的方法,该方法包括:在透明基板上配置相位移层图案及光屏蔽层图案,其中该相位移层图案配置在该透明基板及该光屏蔽层之间;该光罩之整个表面上形成保护层,其中该光罩具有在相位移层图案的相邻部分之间造成桥接的缺陷图案;藉由蚀刻该保护层来露出该缺陷图案;以及移除该露出的缺陷图案。
申请公布号
TW200828408
申请公布日期
2008.07.01
申请号
TW096124241
申请日期
2007.07.04
申请人
海力士半导体股份有限公司
发明人
河泰中
分类号
H01L21/027(2006.01)
主分类号
H01L21/027(2006.01)
代理机构
代理人
何金涂
主权项
地址
韩国
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