发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p>A method of fabricating a semiconductor device is provided to constantly maintain an FICD(Final Inspection Critical Dimension) of a gate by simultaneously forming gates for low and high-voltage transistors. A substrate(110) with a low-voltage gate insulating layer formed in a first region and a high-voltage gate insulating layer formed in a second region is prepared. A gate conduction layer is formed on the low-voltage gate insulating layer and the high-voltage gate insulating layer. The gate conduction layer is etched to form a gate(113A) for a low-voltage transistor in the first region and a gate(113B) for a high-voltage transistor in the second region.</p>
申请公布号 KR20080059956(A) 申请公布日期 2008.07.01
申请号 KR20060133920 申请日期 2006.12.26
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 BACK, WOON SUCK;KIM, JONG IL
分类号 H01L29/78 主分类号 H01L29/78
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