发明名称 Non-volatile memory and manufacturing method thereof
摘要 A non-volatile memory is described, including a substrate, a floating gate, a control gate, a source region, and a drain region. A trench is disposed in the substrate, and a step-like recess is located in the substrate beside the trench. The floating gate is disposed on the sidewall of the trench. The control gate is disposed on the substrate between the trench and the step-like recess which extends in the step-like recess. The source region is disposed in the substrate at the bottom of the trench. The drain region is disposed in the substrate at the bottom of the step-like recess.
申请公布号 US7394126(B2) 申请公布日期 2008.07.01
申请号 US20060308717 申请日期 2006.04.26
申请人 POWERCHIP SEMICONDUCTOR CORP. 发明人 CHANG KO-HSING;CHANG SU-YUAN
分类号 H01L29/788;H01L21/336 主分类号 H01L29/788
代理机构 代理人
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