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发明名称
ELECTROSTATIC CHUCK OF HIGH DENSITY PLASMA DEPOSITION APPARATUS
摘要
申请公布号
KR100842739(B1)
申请公布日期
2008.07.01
申请号
KR20060039518
申请日期
2006.05.02
申请人
发明人
分类号
H01L21/687
主分类号
H01L21/687
代理机构
代理人
主权项
地址
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