发明名称 |
Substrate processing apparatus and method |
摘要 |
Pure water dissolving nitrogen gas and containing microbubbles is supplied to a substrate. Since microbubbles are very minute in size and also have the electrostatic property, they can efficiently adsorb particles on the substrate surface or in the pure water. Further, since pure water dissolving nitrogen gas is unlikely to be charged, the pure water itself never carries new particles from each component of the apparatus. These functions allow efficient particle removal from the substrate surface or the liquid.
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申请公布号 |
US7392814(B2) |
申请公布日期 |
2008.07.01 |
申请号 |
US20050317971 |
申请日期 |
2005.12.24 |
申请人 |
DAINIPPON SCREEN MFG. CO., LTD. |
发明人 |
HASEGAWA KOJI;TANAKA MASATO;HIGUCHI AYUMI;ARAI KENICHIRO |
分类号 |
B08B3/12 |
主分类号 |
B08B3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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