发明名称 All diamond self-aligned thin film transistor
摘要 A substantially all diamond transistor with an electrically insulating substrate, an electrically conductive diamond layer on the substrate, and a source and a drain contact on the electrically conductive diamond layer. An electrically insulating diamond layer is in contact with the electrically conductive diamond layer, and a gate contact is on the electrically insulating diamond layer. The diamond layers may be homoepitaxial, polycrystalline, nanocrystalline or ultrananocrystalline in various combinations. A method of making a substantially all diamond self-aligned gate transistor is disclosed in which seeding and patterning can be avoided or minimized, if desired.
申请公布号 US7394103(B2) 申请公布日期 2008.07.01
申请号 US20050226703 申请日期 2005.09.13
申请人 UCHICAGO ARGONNE, LLC 发明人 GERBI JENNIFER
分类号 H01L31/0312;H01L21/00;H01L29/78 主分类号 H01L31/0312
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