发明名称 |
Actuator system for nanoscale movement |
摘要 |
An actuator system for making a nanoscale movement of an object is provided. In the actuator system, a platform supports the object. A Z-axis actuator connects the platform to the object in a Z-axis direction, and moves the object in the Z-axis direction by Z-axis direction transformation. A frame supports the platform around the platform. An X-axis actuator connects the frame to the platform in an X-axis or Y-axis direction perpendicular to the Z-axis, and moves the object in the X-axis direction by transformation in the direction perpendicular to the Z-axis.
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申请公布号 |
US7393175(B2) |
申请公布日期 |
2008.07.01 |
申请号 |
US20040852501 |
申请日期 |
2004.05.24 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PETRIN ANDREI-B. |
分类号 |
B25J11/00;G11B21/02;B65G27/24;H01L41/09 |
主分类号 |
B25J11/00 |
代理机构 |
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代理人 |
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主权项 |
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