POLISHING PAD OF A CHEMICAL-MECHANICAL POLISHER AND APPARATUS FOR FABRICATING BY THE SAID,申请号KR20060105706-传众专利搜索

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发明名称	POLISHING PAD OF A CHEMICAL-MECHANICAL POLISHER AND APPARATUS FOR FABRICATING BY THE SAID
摘要
申请公布号	KR100842486(B1)	申请公布日期	2008.07.01
申请号	KR20060105706	申请日期	2006.10.30
申请人		发明人
分类号	H01L21/304;B24B37/24;B24B37/26	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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