| 摘要 |
A surface scan measuring device, a surface scan measuring method, a surface scan measuring program and a recording medium storing such a program which can appropriately adjust the scanning speed, the sampling pitch and other measurement parameters according to the surface condition of a workpiece are provided. The surface scan measuring device includes a radius of curvature computing section ( 543 ) for computing the radius of curvature of the scanning point from the measurement data acquired during the ongoing scanning operation, a moving speed deciding section ( 544 ) for deciding the moving speed of the scanning probe according to the computed radius of curvature and a sampling pitch deciding section ( 546 ) for deciding the sampling pitch according to the computed radius of curvature.
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