EQUIPMENT FOR DETECTING ERROR OF WAFER MAPPING SENSOR OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

An apparatus for detecting an error of a wafer mapping sensor of a semiconductor manufacturing system is provided to prevent a malfunction in a mapping process by detecting a fixed state of the wafer mapping sensor correctly. A mapping sensor(102) is installed at one side of a main body(100). The mapping sensor includes a plurality of protrusions having a comb shape in order to sense mapping states of plural wafers in a carrier simultaneously. A plurality of test links(106) are moved in a vertical direction to be positioned across a gap between the protrusions of the mapping sensor. A plurality of hinges(108) are attached to the main body in order to hinge the test links. A test link driving bar(118) drives the test links. An LED driver is formed to drive a plurality of LEDs(112) according to a mapping sense signal of the mapping sensor.