| 摘要 |
A substrate convey track for wet process is provided to prevent generation of scratches on a guide roller by increasing a contact area between a substrate and the guide roller. A bath includes a bottom surface and both sides to form an internal substrate processing space. A plurality of shafts are arranged in parallel in the internal substrate processing space. A plurality of rollers are installed on the shafts. A guide roller(140) is installed between the adjacent shafts. The guide roller rotates in one direction by the friction with the substrate while moving vertically. The guide roller includes a guide shaft(142), a guide roller(144) installed on the guide shaft, a protrusion(148) formed on the guide shaft, and a guide groove(146) formed on the inner surface of the guide roller.
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