发明名称 Apparatus and method for automatic optical inspection
摘要 An automated optical inspection system, comprising at least one camera having a field of view; and at least one image scanning module comprising a plurality of objective modules arranged to have fields of view covering a portion of an article during inspection, and an image selection mirror mechanism, such as a pentaprism movable to sequentially select and transfer images of the fields of view from the objective modules to the at least one camera, and a beam splitter operative to simultaneously direct illumination from at least one illumination source to a portion of the article and to direct an image of the portion of the article to at least one camera, wherein the beam splitter is operative to pivot about at least one axis, thereby to create motion of the image of the article within the field of view of the camera. The objective modules may be arranged in a pair of back-to-back arcs each served by and partially encircling its own optical head. The image selection mirror mechanism may be rotated by a rotating shaft having a driving end, the mechanism being disposed between the shaft's driving end, and the article.
申请公布号 US7394531(B2) 申请公布日期 2008.07.01
申请号 US20060554280 申请日期 2006.10.30
申请人 APPLIED MATERIALS, INC. 发明人 TIROSH EHUD;KENAN BOAZ
分类号 G01N21/00 主分类号 G01N21/00
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