发明名称 Fabrication method of multi-wavelength semiconductor laser device
摘要 The present invention relates to a two-wavelength semiconductor laser device, more particularly, to a fabrication method of a multi-wavelength semiconductor laser device. In this method, a substrate having an upper surface separated into at least first and second areas is provided. Then, a first dielectric mask on the substrate is formed to expose only the first area. Then, epitaxial layers for a first semiconductor laser are grown on the first area of the substrate. Then, a second dielectric mask on the substrate is formed to expose only the second area. Then, epitaxial layers for a second semiconductor laser are grown on the second area of the substrate.
申请公布号 US7393710(B2) 申请公布日期 2008.07.01
申请号 US20050247935 申请日期 2005.10.11
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD 发明人 KIM JIN CHUL;LEE SU YEOL;KIM CHANG ZOO;HAN SANG HEON;SONG KEUN MAN;KIM TAE JUN;CHOI SEOK BEOM
分类号 H01L21/00 主分类号 H01L21/00
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