发明名称 |
SEMICONDUCTOR SUBSTRATE AND METHOD FOR MANUFACTURING SAME |
摘要 |
[PROBLEMS] To provide a semiconductor substrate having an alignment mark which can be used for alignment even after an impurity diffusion layer is formed by planarizing an epitaxial film. [MEANS FOR SOLVING PROBLEMS] A trench (11) is formed in an alignment region of an N+ substrate (1), and a void (3) is left after forming an N- layer (2) by using the trench (11). The void (3) formed on the N+ substrate (1) can be used as an alignment mark. Thus, alignment in the subsequent semiconductor device manufacturing steps can be performed by using such semiconductor substrate, and each element constituting a semiconductor device can be accurately formed at a desired position. |
申请公布号 |
KR20080059596(A) |
申请公布日期 |
2008.06.30 |
申请号 |
KR20087009941 |
申请日期 |
2006.10.05 |
申请人 |
SUMCO CORPORATION;DENSO CORPORATION |
发明人 |
NOGAMI SYOUJI;YAMAOKA TOMONORI;YAMAUCHI SHOICHI;TSUJI NOBUHIRO;MORISHITA TOSHIYUKI |
分类号 |
H01L21/027;G03F7/20;H01L29/06 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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