| 摘要 |
<p>RETAINING RING, FLEXIBLE MEMBRANE FOR APPLYING LOAD TO A RETAINING RING, AND RETAINING RING ASSEMBLY A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. A retaining ring assembly has a flexible membrane shaped to provide an annular chamber and an annular retaining ring, wherein annular concentric projections of the flexible membrane are sized to fit into annular concentric recesses of the annular retaining ring.</p> |
