| 摘要 |
An apparatus and a method for depositing an organic thin film are provided to improve efficiency of a deposition process by processing two substrates in one deposition chamber. A deposition chamber(46) has a substrate supporting member and an organic material deposition source(100) supplying an organic material on a substrate supported by the substrate supporting member. A mask attaching/detaching unit(300) attaches or detaches a mask to or from the substrate supported by the substrate supporting member in the deposition chamber. The substrate supporting member has a frame(212) and a support plate(214) installed on the frame and rotating around a center shaft.
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