| 摘要 |
FIELD: mechanics. ^ SUBSTANCE: invention relates to vacuum devices, particularly, to lock (shut-off) valves designed to shut off working channels of vacuum apparatuses and is to be used with the tape processing devices or tape coating devices. Lock valve 1 is designed to shut off slit-like hole 3 between two various parts of apparatus. Flexible tape substrate 4 passes through aforesaid hole 3. aforesaid valve 1 incorporates at least one movable sealing element 7 interacting with sealing surface 5 to shut off aforesaid hole. In closing lock valve 1 tape substrate gets pressed between sealing element 7 and sealing surface 5 enveloping hole 3, the envelope representing a frame. Aforesaid sealing element 7 is designed to be pressed to sealing surface 5 and/or passed through hole 3 of tape substrate 4 to shut ff aforesaid hole by getting pressed to the edges of sealing surface 5. There is a device processing continuous tape substrates incorporating at least one aforesaid lock valve 1 designed to shut off hole 3 arranged between processing chamber and chamber intended for winding up tape substrate 4. ^ EFFECT: longer life of device provided for by ruling out tape damage and breakage. ^ 13 cl, 3 dwg |
