发明名称 |
METHOD OF FORMING OXIDE-BASED NANO-STRUCTURED MATERIAL |
摘要 |
<p>METHOD OF FORMING OXIDE-BASED NANO-STRUCTURED MATERIAL Provided is a method of forming an oxide-based nano-structured material including growing a nano- structured material using a nano-nucleus having the same composition as the desired oxide-based nano- structured material. A solution is coated on a substrate, the solution including: an organic precursor containing M which is a transition metal or a semi metal; and an organic solvent in which the organic precursor is dissolved. A nano-nucleus having a composition of MxOy is formed on the substrate by annealing the substrate. A nano-structured material having a composition of MxOy is formed by growing the nano-nucleus while supplying a reaction precursor containing M into the nano-nucleus, and the nano- structured material is annealed.</p> |
申请公布号 |
SG143122(A1) |
申请公布日期 |
2008.06.27 |
申请号 |
SG20070089683 |
申请日期 |
2007.09.28 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTIT |
发明人 |
KIM, SANG HYEOB;LEE, SUN YOUNG;MAENG, SUNG LYUL;MYOUNG, HEY JIN |
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