| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To achieve highly accurate laser beam machining by efficient copy control. <P>SOLUTION: A laser beam machining apparatus controls a focus of a laser beam with which a predetermined machining region of a workpiece is irradiated through an optical system unit and performs laser beam machining by copy control, and the laser beam machining apparatus includes; an optical system unit driving means that moves an optical system unit in the direction of the optical axis of the laser beam; a stage driving means that moves a stage holding the workpiece in the direction vertical to the optical axis; a first position measuring means that measures the position of the irradiation face of the workpiece before irradiation with the laser beam, in the direction of the stage moving for the purpose of machining each line in the machining region; and a control means which causes the optical system unit driving means to adjust the optical system unit to a prescribed position, on the basis of the measurement obtained by the first position measuring means and of the pre-accumulated correction information. Thus, the highly accurate machining is achieved. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
