| 摘要 |
PROBLEM TO BE SOLVED: To provide a device capable of smoothly conveying a substrate in a horizontal direction without making any impact on a substrate on a conveyor roller when a substrate mounted on a carry-in conveyor in a lower-layer position is remounted onto a conveying plate and when a substrate on a conveying plate is remounted onto a carry-out conveyor in an upper-layer position. SOLUTION: The device is adapted for vertically lifting and lowering a substrate G fed from a horizontal direction and characterized by: a device body frame 11 of the conveyor device; a pallet 12 adapted for mounting substrate having an arrangement to allow upward and downward movement within the body frame; a means for feeding a substrate 19 arranged on the top side of the pallet to convey a substrate in the horizontal direction; an electric motor 12b provided in the pallet to drive the means for feeding a substrate; and a lift and lower means 13 for moving the pallet upward and downward within the body frame; in which the electric motor is supplied with electric power through non-contact electric power feeding coils 14, 14a provided in the body frame and a non-contact electric power receiving coil 15 provided in the pallet. COPYRIGHT: (C)2008,JPO&INPIT
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