发明名称 FLASH RADIATOR
摘要 PROBLEM TO BE SOLVED: To provide a flash radiator shortening the time width of the pulse current of a flash discharge lamp, and thermally treating an object to be treated. SOLUTION: In the flash radiator for irradiating the object to be treated with flash radiated from the plurality of flash discharge lamps, a flash irradiation device is provided with a first flash discharge lamp and a second flash discharge lamp, the time width of the current of the second flash discharge lamp is smaller than the time width of the current of the first flash discharge lamp, and the current of the second flash discharge lamp is inputted after the current input of the first flash discharge lamp. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008147533(A) 申请公布日期 2008.06.26
申请号 JP20060335267 申请日期 2006.12.13
申请人 USHIO INC 发明人 TORIKAI TETSUYA;MIZOJIRI TAKAFUMI
分类号 H01L21/26;H05B7/144 主分类号 H01L21/26
代理机构 代理人
主权项
地址