发明名称 ALIGNMENT FEATURES IN A PROBING DEVICE
摘要 An image of an array of probes is searched for alignment features. The alignment features are then used to bring contact targets and the probes into contact with one another. The alignment features may be a feature of one or more of the tips of the probes. For example, such a feature may be a corner of one of the tips. An array of probes may be formed to have such alignment features.
申请公布号 US2008150566(A1) 申请公布日期 2008.06.26
申请号 US20080046362 申请日期 2008.03.11
申请人 FORMFACTOR, INC. 发明人 KIM TAE MA;NAGAI BUNSAKI
分类号 G01R31/02;G01R1/067;G01R3/00 主分类号 G01R31/02
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