发明名称 Temperature control device
摘要 A temperature control device which can control the temperature of an object to be processed even after supply of radio waves or electromagnetic waves from a high-frequency heating apparatus is stopped. The temperature control device includes a temperature sensor detecting the temperature of the object to be processed heated by radio waves generated from the high-frequency heating apparatus, a signal processing circuit comparing the temperature detected by the temperature sensor with a standard temperature, a rechargeable battery charged by electric energy generated by reception of the radio waves by an antenna, a charging circuit controlling charging of the rechargeable battery, and a heater supplied with electric power from the rechargeable battery to heat the object to be processed so that the temperature thereof gets closer to the standard temperature, in accordance with a comparison result by the signal processing circuit.
申请公布号 US2008149624(A1) 申请公布日期 2008.06.26
申请号 US20070003124 申请日期 2007.12.20
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 TAMURA HIKARU
分类号 H02J17/00;H02J7/00;H05B6/68 主分类号 H02J17/00
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