ARC-SLIT FOR SOURCE HEAD OF ION IMPLANT APPARATUS

摘要

An arc slit for source head of an ion implant apparatus is provided to maintain constantly a size of a beam hole by exchanging only a beam hole part of an arc slit. An arc-slit for source head of an ion implant apparatus includes a first arc slit body(310) and a second arc slit body(320). The first arc slit body is coupled with or is decoupled from the second arc slit body. A beam hole(321) having a constant length is formed at the second arc body. An ion beam passes through the beam hole. The first arc slit body includes a cross-shaped insertion hole. The cross-shaped insertion hole is formed around a center of the first arc slit body. A first member is formed at a lateral end of the insertion hole.