| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor for improving detection precision of an angular velocity by receiving tension generated due to thermal stress from a substrate by a beam supporting a vibrator. <P>SOLUTION: A detection element 1 of the angular velocity sensor has first to fourth electrostatic force generating means 6-9, first and second vibrators 10, 11, an elastic connection beams 12 for elastically connecting the first and second vibrators 10, 11 and first to fourth electrostatic capacity detection means 13-16. Furthermore, the first to fourth support beams 17, 18, 19, 20 are easy to deform the first and second vibrators 10, 11 in an X axis direction respectively and support by being hardly deformed in Y axis and Z axis directions in a cantilever beam structure from one of the first and second vibrators 19, 11. <P>COPYRIGHT: (C)2008,JPO&INPIT |
