DIE FOR MOLDING OPTICAL ELEMENT HAVING ANTIREFLECTION STRUCTURE, ITS MANUFACTURING PROCESS, AND OPTICAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To realize a manufacturing process of manufacturing a die for molding an optical element having an antireflection structure of a minute concavo-convex surface of a nano-order on the surface of a substrate by a simple process.

SOLUTION: The die 1 for molding the optical element having the minute concavo-convex surface (antireflection structure die surface) 1' is manufactured on the front surface of a substrate 2 by the steps of forming one or more layers of etching transfer layers 3 on the substrate 1, forming a thin film 4 for forming semispherical minute particle on this etching transfer layer 3, generating the cohesive action, the decomposing action or the nucleus formation action of its substance to form a plurality of semispherical island-shape minute particles 5 on the thin film 4, sequentially etching the etching transfer layer and the substrate 2 with reaction gas with the plurality of the island-shape minute particles 5 as a protective mask, and forming a drill-shape pattern on the minute front surface of the substrate 2.

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