发明名称 METAL-OXIDE-SEMICONDUCTOR (MOS) VARACTORS AND METHODS OF FORMING MOS VARACTORS
摘要 MOS varactor having an entire accumulation and depletion regime of its CV characteristic curve in one bias regime (negative or positive). The MOS varactor may comprise a gate electrode, a well region of semiconductor material having a first conductivity type (e.g., p-type), contact regions to the well region that comprise heavily doped semiconductor material of the first conductivity type (e.g., p<SUP>+</SUP>-type), and a Schottky junction formed between the gate and contact regions. The Schottky junction may be formed by spacing the contact regions away from the gate electrode and siliciding the substrate surface. The gate electrode may be formed from semiconductor material of a second conductivity type (e.g., n-type) opposite to the first conductivity type, thus changing the flat band voltage of the MOS varactor and shifting accumulation and depletion regime of the CV characteristic curve in one bias regime, such as the negative bias regime.
申请公布号 US2008149983(A1) 申请公布日期 2008.06.26
申请号 US20060613471 申请日期 2006.12.20
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 RASSEL ROBERT MARK;COOLBAUGH DOUGLAS DUANE;HE ZHONG-XIANG;ESHUN EBENEZER E.;COLLINS DAVID S.;HERSHBERGER DOUGLAS BRIAN
分类号 H01L29/94;H01L21/20;H01L21/336 主分类号 H01L29/94
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