摘要 |
A method for manufacturing a semiconductor device is provided. The method includes: forming a gate insulating layer on a semiconductor substrate having an isolation layer formed therein, forming a gate electrode on the gate insulating, implanting low-concentration impurity ions on the semiconductor substrate at a first side of the gate electrode to form a lightly doped drain (LDD) region, forming a low-concentration impurity region on the semiconductor substrate at a second side of the gate electrode, implanting impurities into the low-concentration impurity region to form a photodiode, and forming micro pits on a top surface of the photodiode using a wet etching process.
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