DEVICE FOR GENERATING HAZE ON A PHOTOMASK

摘要

Provided is a device for generating haze on a photomask capable of irradiating a laser beam of predetermined energy intensity onto a photomask until haze is generated, obtaining an accurate amount of laser beam energy accumulated on the photomask, and controlling an environment in a process chamber. The haze generating device includes: a laser emission unit; an optical system for processing a laser beam emitted from the laser emission unit so that the laser beam has a predetermined shape and energy distribution; a process chamber having a window installed at an upper portion thereof and formed of a transparent material, through which the laser beam passes, and a space formed therein to dispose the photomask and fill a process gas, the space being separated from the outside; a monitoring unit for monitoring whether haze is generated on the photomask while the laser beam that passes through the optical system transmits the window and is irradiated onto the photomask disposed in the space; a moisture supply unit for supplying the space of the process chamber with moisture; a gas supply unit for supplying a mixture gas, in which one or more kinds of gases are mixed, to the space of the process chamber; a heating unit for increasing temperature in the space of the process chamber; and an environment control unit for controlling the moisture supply unit, the gas supply unit and the heating unit based on humidity, temperature and gas composition ratio in the process chamber so that a reference environment having predetermined reference humidity, temperature and gas composition ratio is formed in the space of the process chamber.