| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a long-lived compressor, vacuum pump, compression/vacuum complex machine, and oxygen concentrator by preventing degradation of performance of equipment such as the compressor caused by wear of a packing. <P>SOLUTION: Protective films (DLC coating films) 133a are formed on inner peripheral surfaces of cylinders 133, 135, that is, inner peripheral surfaces where cup packings 71, 73 slide so as to reduce slide resistance by applying diamond-like carbon (DLC) coating. Similarly, protective films (DLC coating films) 71a are formed on surfaces of the cup packings 71, 73, especially a part making contact with the inner peripheral surfaces of the cylinders 133, 135 by applying the DLC coating. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
