发明名称 TREATMENT DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a treatment device capable of executing processing high in productivity such as processing efficiency and processing accuracy by executing a plasma treatment and blasting without changing the device. <P>SOLUTION: This treatment device 1 is provided with a plasma treatment device 11, a blasting device 21 and a workpiece installation part 100 for installing a workpiece 10 thereon, and executes a plasma treatment and blasting to the workpiece 10 installed on the workpiece installation part 100 at the same time or in a predetermined order by using the plasma treatment device 11 and the blasting device 21. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008146994(A) 申请公布日期 2008.06.26
申请号 JP20060332233 申请日期 2006.12.08
申请人 SEIKO EPSON CORP 发明人 GOMI KAZUHIRO
分类号 H05H1/24;B24C1/00;H01L21/3065 主分类号 H05H1/24
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