| 摘要 |
PROBLEM TO BE SOLVED: To provide an element manufacturing method capable of suppressing deterioration due to voltage rise and brightness reduction when left in a high temperature in an organic EL element. SOLUTION: In the organic EL element including an anode substrate, a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, an electron injection layer, and a cathode substrate, by applying an oxygen plasma treatment to the anode substrate surface, the amount of ethanolamine which is a pollutant adhered to the anode substrate surface is reduced to 10 ng/cm<SP>2</SP>or less. As a result, even after left at 80°C for 500 hours, decrease of Hall mobility of the hole injection layer can be suppressed, and since reduction of the driving voltage rise and the brightness reduction is made possible, the organic EL element having long-term reliability can be fabricated. COPYRIGHT: (C)2008,JPO&INPIT
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