| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic mounting tool capable of surely holding a heater provided to a horn without generating no dust. SOLUTION: The ultrasonic mounting tool comprises a horn 22 in which holding holes 31 are provided, in the middle part, in the width direction across the length direction, a vibrator for vibrating the horn at ultrasonic waves, a tool part 25 which is provided to the portion of the lower surface of the horn where vibration becomes maximum to hold a semiconductor chip, a load receiving part 26 provided to the position corresponding to the tool part on the upper surface of the horn, a bracket 27 which is attached to a movable part that is driven vertically to transfer a load applied on the movable part to the tool part while abutted with the load receiving part and connected and fixed to such portion as vibration of the horn becomes minimum by both ends, a heater 32 inserted into the holding hole of the horn, a pair of fitting members 33 provided in such manner as one end is fixed to the bracket while the other end is faced to one end surface and the other end surface of the heater respectively, and an elastic holding member 35 which is provided to the other end of the fitting member to elastically hold the end face of the heater. COPYRIGHT: (C)2008,JPO&INPIT
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