发明名称 |
Substrate-Holder, Etching Method of the Substrate, and the Fabrication Method of a Magnetic Recording Media |
摘要 |
A substrate holder that forms a concavo-convex pattern on recording layers of both of front and back sides of a magnetic recording media is provided. The substrate holder includes an insulator member having a concave portion that holds the etching substrate and a through-hole formed just below the concave portion, and a conductive member having a convex portion that is engaged with the through-hole. A gap is defined between a front side of the convex portion and the bottom surface of the substrate in a state where the etching substrate is mounted on the concave portion, and a thickness of the gap is equal to or higher than 0.5 mm and equal to or lower than 1 mm, and a thickness of the insulator member is equal to or higher than 1 mm and equal to or lower than 15 mm.
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申请公布号 |
US2008149590(A1) |
申请公布日期 |
2008.06.26 |
申请号 |
US20070942849 |
申请日期 |
2007.11.20 |
申请人 |
MAEDA KENJI;SATAKE MAKOTO;IZAWA MASARU |
发明人 |
MAEDA KENJI;SATAKE MAKOTO;IZAWA MASARU |
分类号 |
C23F1/04;C23F1/08 |
主分类号 |
C23F1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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