Thickness measurement device determines material thickness between first and second main surface using first and second measured distances and first material thickness measured from x-ray attenuation

摘要

The arrangement has first and second distance measurement devices (26,28) for determining first and second distances (32a,32b) to first and second opposing main surfaces of the object (20) in a measurement direction, an x-ray device (30a) for determining a first material thickness from the attenuation of x-rays passing through the object and an evaluation device for determining the material thickness (22) between the first and second main surface using the first and second distances and the first material thickness. An independent claim is also included for a method of measuring the material thickness of an object.