| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a conditioning device which uniformly conditions an abrasive cloth surface, and elongating a life of the abrasive cloth. <P>SOLUTION: This conditioning device of an abrasive cloth comprises: high-pressure injection nozzles 2a, 2b arranged to inject cleaning liquid to rotating abrasive cloths 12a, 12b, and comprising an ultrasonic generator communicated so as to supply the cleaning liquid and propagating ultrasonic waves to the cleaning liquid; a nozzle moving mechanism 4 moving the nozzles in a radial direction of the abrasive cloth; and a high-pressure pump 5 transferring the cleaning liquid to the ultrasonic generator. <P>COPYRIGHT: (C)2008,JPO&INPIT |
