| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a low-cost laser irradiation apparatus, the low-cost laser irradiation apparatus for carrying out a high quality treatment, and a laser irradiation method which is implemented at low cost. <P>SOLUTION: A laser irradiation apparatus comprises a plurality of semiconductor lasers for emitting a laser beam, a plurality of optical fibers which comprise an incident end surface and an emission end surface, in which the emission end surface is arranged along a first direction, which are prepared corresponding to the plurality of semiconductor lasers, from the incident end surface of a corresponding optical fiber of which each laser beam emitted from the plurality of semiconductor lasers is introduced, and from the emission end surface of the corresponding optical fiber of which the laser beam is emitted, and an optical system for focusing the laser beam emitted from the emission end surface of the plurality of optical fibers in a second direction intersecting with the first direction but not in the first direction. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
