AMELIORATING CHARGE TRAP IN INSPECTING SAMPLES USING SCANNING ELECTRON MICROSCOPE

摘要

A sample inspection apparatus to inspect a sample using a scanning electron microscope irradiates the sample with electron beams. The sample inspection apparatus includes a charge collecting unit that collects charges generated from a surface of the sample due to irradiation thereof by the electron beams. The cost required for sample inspection is reduced, and an image having high quality is provided by the sample inspection apparatus.