发明名称 Assembly for blocking a beam of radiation and method of blocking a beam of radiation
摘要 An assembly is provided for blocking a beam of radiation. The assembly has a pipe arranged to transmit at least part of the beam of radiation. The pipe has an inner surface provided with an ablation material and encloses a volume. The assembly further has an ablation generation device. The ablation generation device is arranged to ablate at least a portion of the ablation material upon reception of a blocking signal. The assembly has a control unit, which is arranged to control the ablation generation device.
申请公布号 US2008148978(A1) 申请公布日期 2008.06.26
申请号 US20060643954 申请日期 2006.12.22
申请人 ASML NETHERLANDS B. V. 发明人 BANINE VADIM YEVGENYEVICH;IVANOV VLADIMIR VITALEVICH;KOSHELEV KONSTANTIN NIKOLAEVICH;KRIVTSUN VLADIMIR MIHAILOVITCH
分类号 G03B27/52;B41M5/00 主分类号 G03B27/52
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