| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a microminiaturized condenser microphone having a flexure hinge-shaped upper diaphragm and a back plate, and to provide a method of manufacturing the same. <P>SOLUTION: The method of manufacturing includes the steps of forming a lower silicon layer 21a and a first insulating layer 21b; forming an upper silicon layer for the back plate on the first insulating layer; forming a plurality of sound holes 22a by patterning the upper silicon layer; forming a second insulating layer 23 on the upper silicon layer; forming a conductive layer on the upper silicon layer, forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm 25 on the sacrificial layer, forming a plurality of air holes 25c that passes through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching for removing the sacrificial layer, the passivation layer, the conductive layer, the upper silicon layer, the first insulating layer and the lower silicon layer to form an air gap 24 between the diaphragm and the upper silicon layer, thereby enabling improvement in sensitivity and reduce the size of the condenser microphone. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
