发明名称 |
SCANNING PROBE MICROSCOPE WITH AUTOMATIC PROBE REPLACEMENT FUNCTION |
摘要 |
Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.
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申请公布号 |
US2008149829(A1) |
申请公布日期 |
2008.06.26 |
申请号 |
US20070872614 |
申请日期 |
2007.10.15 |
申请人 |
JO HYEONG CHAN;LIM HONG JAE;SHIN SEUNG JUN;KIM JOON HUI;KIM YONG SEOK;PARK SANG-IL |
发明人 |
JO HYEONG CHAN;LIM HONG JAE;SHIN SEUNG JUN;KIM JOON HUI;KIM YONG SEOK;PARK SANG-IL |
分类号 |
H01J37/28;G01Q70/02 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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